Control the deposition uniformity using ring cathode by DC discharge technique

  • Kadhim A. Aadim
Keywords: Simulation, DC discharge, sputtering.

Abstract

Simulation of direct current (DC) discharge plasma using
COMSOL Multiphysics software were used to study the uniformity
of deposition on anode from DC discharge sputtering using ring and
disc cathodes, then applied it experimentally to make comparison
between film thickness distribution with simulation results. Both
simulation and experimental results shows that the deposition using
copper ring cathode is more uniformity than disc cathode

Published
2019-01-11
Section
Articles