Effect of Argon and oxygen pressure on Zn magnetron plasma produced by RF power supply

  • Kadhim A. Aadim
Keywords: RF magnetron, spectroscopy, ratio method, plasma characteristics.


In this work, the plasma parameters (electron temperature and
electron density) were determined by optical emission spectroscopy
(OES) produced by the RF magnetron Zn plasma produced by
oxygen and argon at different working pressure. The spectrum was
recorded by spectrometer supplied with CCD camera, computer and
NIST standard of neutral and ionic lines of Zn, argon and oxygen.
The effects of pressure on plasma parameters were studied and a
comparison between the two gasses was made.