Effect of Argon and oxygen pressure on Zn magnetron plasma produced by RF power supply

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Effect of Argon and oxygen pressure on Zn magnetron plasma produced by RF power supply
Published: 08-01-2019
DOI: https://doi.org/10.30723/ijp.v15i34.121
Keywords:
RF magnetron, spectroscopy, ratio method, plasma characteristics.

Main Article Content

Kadhim A. Aadim

Abstract

In this work, the plasma parameters (electron temperature and
electron density) were determined by optical emission spectroscopy
(OES) produced by the RF magnetron Zn plasma produced by
oxygen and argon at different working pressure. The spectrum was
recorded by spectrometer supplied with CCD camera, computer and
NIST standard of neutral and ionic lines of Zn, argon and oxygen.
The effects of pressure on plasma parameters were studied and a
comparison between the two gasses was made.

Article Details

Issue

Vol. 15 No. 34 (2017)

Section

Articles
Creative Commons License

This work is licensed under a Creative Commons Attribution 4.0 International License.

© 2023 The Author(s). Published by College of Science, University of Baghdad. This is an open-access article distributed under the terms of the Creative Commons Attribution 4.0 International License. 

How to Cite

1.
Aadim KA. Effect of Argon and oxygen pressure on Zn magnetron plasma produced by RF power supply. IJP [Internet]. 2019 Jan. 8 [cited 2025 Jan. 18];15(34):65-71. Available from: https://ijp.uobaghdad.edu.iq/index.php/physics/article/view/121

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