Electrical glow discharges and plasma parameter of planar sputtering system for silver target. Iraqi Journal of Physics, [S. l.], v. 16, n. 37, p. 65–72, 2018. DOI: 10.30723/ijp.v16i37.77. Disponível em: https://ijp.uobaghdad.edu.iq/index.php/physics/article/view/77.. Acesso em: 30 apr. 2024.