Influence of electrodes area ratios and the discharge volume in RF capacitively coupled plasma. Iraqi Journal of Physics, [S. l.], v. 11, n. 20, p. 1–8, 2019. DOI: 10.30723/ijp.v11i20.376. Disponível em: https://ijp.uobaghdad.edu.iq/index.php/physics/article/view/376.. Acesso em: 29 apr. 2024.