AHMAD, Moyad A. Influence of grounded electrode area on breakdown current in RF capcitively coupled plasma. Iraqi Journal of Physics, Baghdad, Iraq., v. 10, n. 17, p. 90–97, 2012. Disponível em: https://ijp.uobaghdad.edu.iq/index.php/physics/article/view/778.. Acesso em: 19 dec. 2024.